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DCE(Trans-1,2 -Dichloroethylene)

Product name

DCE(Trans-1,2 -Dichloroethylene)

CAS No.

156-60-5

Appearance

Colorless Transparent Liquid

Properties

Flammable, keep away from oxidants. Density (water=1) 1.26kg/l; Melting point -50 ℃. Flash point 2 ℃

Use

Used for silicon wafer oxidation and furnace tube cleaning in industries such as semiconductors, discrete devices, and MEMS.

Package

Quartz source bottle or coated quartz source bottle (Bubbler), equipped with PTFE valve.

Quality standard

Component	Purity
Dichloroethylene	99.999995%